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Plasma Charging Damage 2001 edition
Kin P. Cheung
Plasma Charging Damage 2001 edition
Kin P. Cheung
In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.
346 pages, biography
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | October 4, 2000 |
ISBN13 | 9781852331443 |
Publishers | Springer London Ltd |
Pages | 346 |
Dimensions | 155 × 235 × 20 mm · 657 g |
Language | English |
See all of Kin P. Cheung ( e.g. Paperback Book and Hardcover Book )