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Silicon Anodization as a Structuring Technique Ivanov 1st ed. 2018 edition
Silicon Anodization as a Structuring Technique
Ivanov
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
316 pages, 3 Tables, color; 3 Illustrations, color; 138 Illustrations, black and white; XXIX, 316 p.
| Media | Books Book |
| Released | September 22, 2017 |
| ISBN13 | 9783658192372 |
| Publishers | Springer |
| Pages | 316 |
| Dimensions | 150 × 220 × 20 mm · 417 g |
| Language | German |
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