Silicon Anodization as a Structuring Technique - Ivanov - Books - Springer - 9783658192372 - September 22, 2017
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Silicon Anodization as a Structuring Technique 1st ed. 2018 edition

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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.


316 pages, 3 Tables, color; 3 Illustrations, color; 138 Illustrations, black and white; XXIX, 316 p.

Media Books     Book
Released September 22, 2017
ISBN13 9783658192372
Publishers Springer
Pages 316
Dimensions 150 × 220 × 20 mm   ·   417 g
Language German  

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