Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology - Seongbo Shim - Books - Springer Nature Switzerland AG - 9783030094553 - February 8, 2019
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Seongbo Shim
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Softcover Reprint of the Original 1st 2018 edition

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.

Media Books     Paperback Book   (Book with soft cover and glued back)
Released February 8, 2019
ISBN13 9783030094553
Publishers Springer Nature Switzerland AG
Pages 138
Dimensions 150 × 220 × 10 mm   ·   226 g
Language German  

See all of Seongbo Shim ( e.g. Paperback Book and Hardcover Book )